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SW150A-6025-T
Special spindles [Spindles for polishing semiconductor wafers]
Spindles for semiconductor equipment manufactured by SAMWOO are currently used in two fields.
A spindle for quartz processing to process quartz , a semiconductor wafer material, and a spindle for wafer polishing to precisely polish processed wafers. The spindle for quartz processing uses a ball bearing with high rigidity to enhance machinability, and the spindle for polishing uses an air bearing to enhance precision.
In addition, we are custom-manufacturing various and special spindles for semiconductors.
Specification
| Housing diameter(Ø) | 150 |
|---|---|
| Housing material | Stainless steel |
| Power(S1)kw | 2.5 |
| Max speed(rpm) | 6,000 |
| Max frequency(Hz) | 200 |
| Torque(Nm) | 4.1 |
| Current(A) | 9.2 |
| Motor poles | 4 |
| Tool change | manual |
| Tool interface | Taper |
| option | × |
| Cooling system | water / oil |
| Bearing lubrication | Air |
| Weight(kg) | 45 |
| Cup wheel(Ø) | 116 |
Power & Torque Curve
Drawing
